Multilevel nanoimprint lithography

Current Applied Physics

Volumn 4, Issue 2-4, 2004, Pages 111-114

  Alkaisi, M M ^a   Jayatissa, W ^a   Konijn, M ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

Low temperature nanoimprint; Multilevel lithography; Silicon nitride molds

Indexed keywords

EID: 1542610703     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2003.10.009     Document Type: Article

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