3D structures for UV-NIL template fabrication with grayscale e-beam lithography

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 945-948

  Piaszenski, Guido ^a   Barth, Ulrich ^a   Rudzinski, Axel ^a   Rampe, Andreas ^a   Fuchs, Andreas ^b   Bender, Markus ^b   Plachetka, Ulrich ^b  

^a RAITH GmbH   (Germany)

^b AMO GMBH   (Germany)

Author keywords

3D Electron beam lithography; Imprint lithography; Metrology; Template fabrication

Indexed keywords

CONDUCTIVE PLASTICS; COPOLYMERS; ELECTRIC INSULATING MATERIALS; POLYMETHYL METHACRYLATES; QUARTZ; SPIN COATING;

3D ELECTRON BEAM LITHOGRAPHY; IMPRINT LITHOGRAPHY; QUARTZ SUBSTRATES; TEMPLATE FABRICATION;

ELECTRON BEAM LITHOGRAPHY;

EID: 34247570476     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.015     Document Type: Article

References (3)

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