A review of ion beam induced charge microscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 264, Issue 2, 2007, Pages 345-360

  Breese, M B H ^a   Vittone, E ^b   Vizkelethy, G ^c   Sellin, P J ^d  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b UNIVERSITY OF TURIN   (Italy)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

Charge transport measurements; IBIC microscopy; Nuclear microprobes

Indexed keywords

CHARGE COUPLED DEVICES; CHARGE TRANSFER; INSULATING MATERIALS; MICROELECTRONICS; MICROSCOPIC EXAMINATION; RADIATION DETECTORS; SEMICONDUCTOR DEVICES;

CHARGE-COUPLED ARRAYS; HIGH POWER TRANSISTORS; ION BEAM INDUCED CHARGE (IBIC) MICROSCOPY; MICROPROBE LABORATORIES; SEMI-INSULATING MATERIALS;

ION BEAMS;

EID: 36148943964     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.09.031     Document Type: Article

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