Theory of ion beam induced charge measurement in semiconductor devices based on the Gunn's theorem

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 1043-1050

  Vittone, E ^a  

^a UNIVERSITY OF TURIN   (Italy)

Author keywords

Charge collection efficiency; Gunn's theorem; IBIC; Nuclear microprobe; Radiation detectors; Shockley Ramo theorem

Indexed keywords

CHARGE CARRIERS; ELECTRIC CHARGE; ELECTRIC POTENTIAL; ELECTRIC SPACE CHARGE; ELECTRODES; ELECTROSTATICS; SEMICONDUCTOR DEVICES; THEOREM PROVING;

CHARGE COLLECTION EFFICIENCY; HIGH FREQUENCY VACUUM TUBES; MULTIELECTRODE SYSTEMS; NUCLEAR MICROPROBES;

ION BEAMS;

EID: 2442457516     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.210     Document Type: Conference Paper

References (15)

1. Shockley W. J. Appl. Phys. 9:1938;635.
2. Ramo S. Proc. IRE. 27:1939;584.
3. Cavalleri G., Fabri G., Gatti E., Svelto V. Nucl. Instr. and Meth. 21:1963;177.
4. Cavalleri G., Gatti E., Fabri G., Svelto V. Nucl. Instr. and Meth. 92:1971;137.
5. Jackson J.D. Classical Electrodynamics. second ed. 1975;Wiley, New York.
6. Breese M.B.H., Jamieson D.N., King P.J.C. Materials Analysis Using a Nuclear Microprobe. 1996;John Wiley & Sons, New York. and references therein.
7. Vittone E., Fizzotti F., Lo Giudice A., Paolini C., Manfredotti C. Nucl. Instr. and Meth. B. 161-163:2000;446.
8. Gunn J.B. Solid-State Electron. 7:1964;739.
9. Prettyman T.H. Nucl. Instr. and Meth. A. 422:1999;232.
10. Selberherr S. Analysis and Simulation of Semiconductor Devices. 1984;Springer, Vienna.
11. He Z. Nucl. Instr. and Meth. A. 463:2001;250.
12. Tove P.A., Falk K. Nucl. Instr. and Meth. 12:1961;278.
13. M.R. Pinto, C.S. Rafferty, H.R. Yeager, R.W. Dutton, PISCES IIB, Supplementary Report, Stanford Electronics Lab., Dept. Electrical Engineering, Stanford University, 1985.
14. Zwillinger D. Handbook of Differential Equations. third ed. 1998;Academic Press, Boston, MA. ISBN 0127843957.
15. Vittone E., Fizzotti F., Gargioni E., Lu R., Polesello P., Lo Giudice A., Manfredotti C., Galassini S., Jaksic M. Nucl. Instr. and Meth. B. 158:1999;476.