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Volumn 130, Issue 1-4, 1997, Pages 528-533
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Study of basic mechanisms of semiconductor devices using ion beam induced charge (IBIC) collection
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
DIFFUSION IN SOLIDS;
ELECTRIC CHARGE;
ELECTRODES;
IMAGING TECHNIQUES;
ION BEAMS;
ION BOMBARDMENT;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE STRUCTURES;
SEMICONDUCTOR GROWTH;
SPECTRUM ANALYSIS;
SUBSTRATES;
ION BEAM INDUCED CHARGE (IBIC);
ION MICROBEAMS;
SEMICONDUCTOR JUNCTIONS;
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EID: 0031549066
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(97)00245-0 Document Type: Article |
Times cited : (5)
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References (8)
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