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Volumn 130, Issue 1-4, 1997, Pages 528-533

Study of basic mechanisms of semiconductor devices using ion beam induced charge (IBIC) collection

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIFFUSION IN SOLIDS; ELECTRIC CHARGE; ELECTRODES; IMAGING TECHNIQUES; ION BEAMS; ION BOMBARDMENT; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; SPECTRUM ANALYSIS; SUBSTRATES;

EID: 0031549066     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00245-0     Document Type: Article
Times cited : (5)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.