Anomalous charge collection from silicon-on-insulator structures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 210, Issue , 2003, Pages 211-215

  Vizkelethy, G ^a   Dodd, P E ^a   Schwank, J R ^a   Shaneyfelt, M R ^a   Walsh, D S ^a   McDaniel, F D ^b   Doyle, B L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

Broad beam; Ion beam induced charge collection; Microbeam; Silicon on insulator; Single event upset

Indexed keywords

ELECTRIC CHARGE; ION BEAMS; SUBSTRATES;

SINGLE EVENT UPSET (SEU);

SILICON ON INSULATOR TECHNOLOGY;

EID: 0042513887     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01072-3     Document Type: Conference Paper

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