Heavy ion beam induced current/charge (IBIC) through insulating oxides

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 204-208

  Vizkelethy, Gyorgy ^a   Brice, David K ^a   Doyle, Barney L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ION BEAMS; MATHEMATICAL MODELS; MOS CAPACITORS; OXIDES; SILICON ON INSULATOR TECHNOLOGY;

CHARGE GENERATION; INDUCED CHARGE; INSULATING OXIDES; ION BEAM INDUCED CURRENT/CHARGE (IBIC);

HEAVY IONS;

EID: 33745838980     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.115     Document Type: Article

References (9)

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