Fundamentals of focused ion beam nanostructural processing: Below, at, and above the surface

MRS Bulletin

Volumn 32, Issue 5, 2007, Pages 424-432

  MoberlyChan, Warren J ^a   Adams, David P ^a   Aziz, Michael J ^a   Hobler, Gerhard ^a   Schenkel, Thomas ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM COMPOUNDS; MICROELECTRONICS; MOLECULAR INTERACTIONS; NANOSTRUCTURED MATERIALS; PARTICLE BEAM INJECTION; TRANSMISSION ELECTRON MICROSCOPY;

GALLIUM IONS; NANOMETER SCALES; SAMPLE INTERACTIONS;

FOCUSED ION BEAMS;

EID: 34249800643     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2007.66     Document Type: Article

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