High brightness inductively coupled plasma source for high current focused ion beam applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2902-2906

  Smith, N S ^a   Skoczylas, W P ^a   Kellogg, S M ^a   Kinion, D E ^a   Tesch, P P ^a   Sutherland, O ^b   Aanesland, A ^b   Boswell, R W ^b  

^a Thermo Fisher Scientific   (United States)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; IMAGING TECHNIQUES; ION BEAMS; LENSES; OPTICAL PROPERTIES; OPTICAL RESOLVING POWER;

ANGULAR INTENSITY; IMAGING CAPABILITIES; SPHERICAL ABERRATION;

INDUCTIVELY COUPLED PLASMA;

EID: 33845242768     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2366617     Document Type: Article

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