Transient topographies of ion patterned Si(111)

Physical Review Letters

Volumn 95, Issue 5, 2005, Pages

  Brown, Ari David ^a   Erlebacher, Jonah ^a   Chan, Wai Lun ^b   Chason, Eric ^b  

^a Johns Hopkins University   (United States)

^b Brown University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION-SPUTTERED SI(111); MONTE-CARLO SIMULATION; SELF-ORGANIZED ARRAYS; SPUTTER PATTERNING;

COMPUTER SIMULATION; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; NEGATIVE IONS; SILICON; SPUTTERING;

SURFACE TOPOGRAPHY;

EID: 27144517413     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.95.056101     Document Type: Article

References (26)

1. J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair, and J.A. Floro, Phys. Rev. Lett. 82, 2330 (1999). PRLTAO 0031-9007 10.1103/PhysRevLett.82.2330
2. J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair, and J.A. Floro, J. Vac. Sci. Technol. A 18, 115 (2000). JVTAD6 0734-2101 10.1116/1.582127
3. S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H.L. Hartnagle, Science SCIEAS 0036-8075 285, 1551 (1999). 10.1126/science.285.5433. 1551
4. F. Frost and B. Rauschenbach, Appl. Phys. A 1432-0630 77, 1 (2003). 10.1007/s00339-002-2059-3
5. S. Rusponi, G. Constantini, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 81, 4184 (1998). PRLTAO 0031-9007 10.1103/PhysRevLett.81.4184
6. E. Chason, T.M. Mayer, B.K. Kellerman, D.T. McIlroy, and A.J. Howard, Phys. Rev. Lett. 72, 3040 (1994). PRLTAO 0031-9007 10.1103/PhysRevLett.72.3040
7. C.C. Umbach, R.L. Headrick, and K.-C. Chang, Phys. Rev. Lett. 87, 246104 (2001). PRLTAO 0031-9007 10.1103/PhysRevLett.87.246104
8. E. Chason, M.B. Sinclair, J.A. Floro, J.A. Hunter, and R.Q. Hwang, Appl. Phys. Lett. 72, 3276 (1998). APPLAB 0003-6951 10.1063/1.121622
9. J.M. Elson, Phys. Rev. B PRBMDO 0163-1829 30, 5460 (1984). 10.1103/PhysRevB.30.5460
10. G. Carter and V. Vishnyakov, Phys. Rev. B PRBMDO 0163-1829 54, 17647 (1996). 10.1103/PhysRevB.54.17647
11. S. Rusponi, G. Constantini, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 81, 2735 (1998). PRLTAO 0031-9007 10.1103/PhysRevLett.81.2735
12. M.A. Makeev, R. Cuerno, and A.-L. Barabasi, Nucl. Instrum. Methods Phys. Res., Sect. B NIMBEU 0168-583X 197, 185 (2002). 10.1016/S0168-583X(02)01436-2
13. R.M. Bradley and J.M.E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988). JVTAD6 0734-2101 10.1116/1.575561
14. P. Sigmund, J. Mater. Sci. JMTSAS 0022-2461 8, 1545 (1973). 10.1007/BF00754888
15. W.W. Mullins, J. Appl. Phys. 30, 77 (1959); JAPIAU 0021-8979 10.1063/1.1734979
16. C. Herring in The Physics of Powder Metallurgy, edited by, W.E. Kingston, (McGraw-Hill, New York, 1959), Chap. A.
17. H.C. Jeong and E.D. Williams, Surf. Sci. Rep. 34, 171 (1999). SSREDI 0167-5729 10.1016/S0167-5729(98)00010-7
18. S. Kodiyalam, K.E. Khor, and S. Das Sarma, Phys. Rev. B PRBMDO 0163-1829 53, 9913 (1996). 10.1103/PhysRevB.53.9913
19. E.D. Williams, E. Fu, Y.-N. Yang, D. Kandel, and J.D. Weeks, Surf. Sci. SUSCAS 0039-6028 336, L746 (1995). 10.1016/0039-6028(95)00551-X
20. J.F. Ziegler and J.P. Biersack, computer code SRIM-2003.20, 2003.
21. S. Park, B. Kahng, H. Jeong, and A.-L. Barabasi, Phys. Rev. Lett. 83, 3486 (1999). PRLTAO 0031-9007 10.1103/PhysRevLett.83.3486
22. M. Rost and J. Krug, Phys. Rev. Lett. 75, 3894 (1995). PRLTAO 0031-9007 10.1103/PhysRevLett.75.3894
23. I. Koponen, M. Hautala, and O.-P. Sievanen, Phys. Rev. Lett. 78, 2612 (1997). PRLTAO 0031-9007 10.1103/PhysRevLett.78.2612
24. A.K. Hartmann and R. Kree, Phys. Rev. B PRBMDO 0163-1829 65, 193403 (2002). 10.1103/PhysRevB.65.193403
25. M. Stepanova and S.K. Dew, Appl. Phys. Lett. 84, 1374 (2004). APPLAB 0003-6951 10.1063/1.1650546
26. E. Chason and B.W. Dodson, J. Vac. Sci. Technol. A JVTAD6 0734-2101 9, 1545 (1991). 10.1116/1.577659