Chemically and geometrically enhanced focused ion beam micromachining

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2494-2498

  Russell, P E ^a   Stark, T J ^a,b   Griffis, D P ^a   Phillips, J R ^a   Jarausch, K F ^a  

^a North Carolina State University   (United States)

^b Materials Analytical Services   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001236893     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590197     Document Type: Article

References (21)

1. T. D. Cambria and N. P. Economou, Solid State Technol. Sept., 133 (1987).
2. L. R. Harriott, A. Wagner, and F. J. Fritz, J. Vac. Sci. Technol. B 4, 181 (1986).
3. J. Melngailis, C. R. Musil, E. H. Stevens, M. Utlaut, E. M. Kellogg, R. T. Post, M. W. Geis, and R. W. Mountain, J. Vac. Sci. Technol. B 4, 176 (1986).
4. D. C. Shaver and B. W. Ward, Solid State Technol. Dec., 73 (1985).
5. K. Gamo, Y. Ochiai, K. Shioyama, and S. Namba, Proc. SPIE 632, 52 (1986).
6. Y. Ochiai, K. Gamo, and S. Namba. J. Vac. Sci. Technol. B 3, 67 (1985).
7. J. G. Pellerin, D. P. Griffis, and P. E. Russell, J. Vac. Sci. Technol. B 8, 1945 (1990).
8. X. Xu, A. D. Della Ratta, J. Sosonkina, and J. Melngailis, J. Vac. Sci. Technol. B 10, 2675 (1992).
9. T. J. Stark, D. P. Griffis, and P. E. Russell, J. Vac. Sci. Technol. B 14, 3990 (1996).
10. H. Ximen and C. G. Talbet, Proceedings of the 20th International Symposium for Testing and Failure Analysis (Nov. 1994), Vol. 141, pp. 13-18.
11. R. J. Young, J. R. Cleaver, and H. Ahmed, J. Vac. Sci. Technol. B 11, 234 (1993).
12. R. J. Young, Vacuum 44, 353 (1993).
13. M. Komuro and H. Hiroshima, J. Vac. Sci. Technol. B 9, 2656 (1991).
14. K. Gamo, Y. Ochiai, and S. Namba, Jpn. J. Appl. Phys., Part 2 21, L792 (1982).
15. J. D. Casey, Jr., A. F. Doyle, R. G. Lee, D. K. Stewart, and H. Zimmermann, Microelectron. Eng. 24, 43 (1994).
16. Z. Xu, K. Gamo, and S. Namba, J. Vac. Sci. Technol. B 6, 1039 (1988).
17. D. M. Thaus, Masters thesis, North Carolina State University, Raleigh, NC, 1996.
18. D. M. Thaus, T. J. Stark, D. P. Griffis, and P. E. Russell, J. Vac. Sci. Technol. B 14, 3928 (1996).
19. D. M. Thaus, T. J. Stark, D. P. Griffis, and P. E. Russell, Appl. Phys. Lett. 68, 26 (1996).
20. T. J. Stark, G. M. Shedd, J. Vitarelli, D. P. Griffis, and P. E. Russell, J. Vac. Sci. Technol. B 13, 2585 (1995).
21. E. S. Berkovitch, Indust. Diamond Rev. 11, 129 (1951).