FIBSIM - Dynamic Monte Carlo simulation of compositional and topography changes caused by focused ion beam milling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 180, Issue 1-4, 2001, Pages 125-129

  Boxleitner, W ^a   Hobler, G ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Focused ion beam; Ion beam milling; Monte Carlo simulation; Sputtering; Topography simulation

Indexed keywords

COMPOSITION EFFECTS; COMPUTER SIMULATION; ION BEAMS; MATHEMATICAL MODELS; MILLING (MACHINING); MONTE CARLO METHODS; SPUTTERING;

FOCUSED ION BEAM MILLING;

TARGETS;

EID: 0035365119     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00406-2     Document Type: Conference Paper

References (16)