Fabrication of nanomagnetic probes via focused ion beam etching and deposition

Nanotechnology

Volumn 13, Issue 5, 2002, Pages 619-622

  Khizroev, S ^a   Bain, J A ^a,b   Litvinov, D ^a  

^a SEAGATE RESEARCH   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; ION BEAMS; MAGNETIC MATERIALS; MAGNETIZATION; MICROSCOPIC EXAMINATION; PROBES; TUNGSTEN;

FOCUSED ION BEAMS (FIB); NANOMAGNETIC PROBES;

NANOSTRUCTURED MATERIALS;

EID: 0036802782     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/13/5/315     Document Type: Article

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