Semiconductor physics: Reliable performance

Nature Materials

Volumn 4, Issue 11, 2005, Pages 799-800

  Schenkel, Thomas ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; DOPING (ADDITIVES); ELECTRONIC PROPERTIES; ION IMPLANTATION; TRANSPORT PROPERTIES;

DIFFUSIVE TRANSPORT; SEMICONDUCTOR PHYSICS; TRANSISTOR CHANNEL;

SEMICONDUCTOR DEVICES;

EID: 33645012699     PISSN: 14761122     EISSN: 14764660     Source Type: Journal    
DOI: 10.1038/nmat1514     Document Type: Article

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