Focused ion beam milling of diamond: Effects of H 2O on yield, surface morphology and microstructure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2334-2343

  Adams, D P ^a   Vasile, M J ^a   Mayer, T M ^a   Hodges, V C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAM (FIB) MILLING; ION INCIDENCE ANGLES;

AMORPHIZATION; ATOMIC FORCE MICROSCOPY; BINDING ENERGY; COMPUTER SIMULATION; CRYSTAL STRUCTURE; ION BEAMS; ION BOMBARDMENT; MANOMETERS; MICROSTRUCTURE; MILLING (MACHINING); MORPHOLOGY; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; WATER;

DIAMONDS;

EID: 0942299743     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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