Reducing FIB damage using low energy ions

Microscopy and Microanalysis

Volumn 12, Issue SUPPL. 2, 2006, Pages 1260-1261

  Giannuzzi, L A ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750863184     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927606065469     Document Type: Conference Paper

References (2)

1. Giannuzzi et al., Microsc Microanal 9(Suppl 2), (2005) 828.
2. JF Ziegler and JP Biersack, SRIM 2003, www.SRIM.com.