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Volumn 80, Issue 5, 2006, Pages 475-479

A phenomenological model of ion-bombardment-induced amorphization and re-crystallization in Si

Author keywords

Amorphization; i v pairs; Ion bombardment; Ion flux; Re crystallization; Si; Substrate temperature; Theoretical model

Indexed keywords

AMORPHIZATION; ANNEALING; DEFECTS; ION BOMBARDMENT; RECRYSTALLIZATION (METALLURGY);

I-V PAIRS; ION FLUX; SUBSTRATE TEMPERATURE; THEORETICAL MODEL;

SILICON;

EID: 30344485980 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2005.08.020 Document Type: Article

Times cited : (1)

References (14)

1
- 0000781005
- S. Takeda, and J. Yamasaki J Phys Rev Lett 83 1999 320
- (1999) J Phys Rev Lett , vol.83 , pp. 320
- Takeda, S.¹ Yamasaki, J.²

2
- 0025249564
- B. Zeroual, and G. Carter Nucl Instr and Meth 44 1990 318
- (1990) Nucl Instr and Meth , vol.44 , pp. 318
- Zeroual, B.¹ Carter, G.²

3
- 0000135552
- A. Battaglia, F. Priolo, E. Rimini, and G. Ferla Appl Phys Lett 56 1990 2622
- (1990) Appl Phys Lett , vol.56 , pp. 2622
- Battaglia, A.¹ Priolo, F.² Rimini, E.³ Ferla, G.⁴

4
- 19144366632
- L. Pelaz, L.A. Marques, and J. Barbolla J Appl Phys 96 2004 5947
- (2004) J Appl Phys , vol.96 , pp. 5947
- Pelaz, L.¹ Marques, L.A.² Barbolla, J.³

5
- 0035878366
- L.A. Marques, L. Pelaz, J. Hernandez, J. Barbolla, and G.H. Gilmer Phys Rev B 64 2001 45214
- (2001) Phys Rev B , vol.64 , pp. 45214
- Marques, L.A.¹ Pelaz, L.² Hernandez, J.³ Barbolla, J.⁴ Gilmer, G.H.⁵

6
- 0242352693
- L.A. Marquez, M. Pelaz, M. Aboy, L. Enriquez, and J. Barbolla Phys Rev Lett 91 2003 135504
- (2003) Phys Rev Lett , vol.91 , pp. 135504
- Marquez, L.A.¹ Pelaz, M.² Aboy, M.³ Enriquez, L.⁴ Barbolla, J.⁵

7
- 0001051163
- M. Tang, L. Colombo, J. Zhu, and T.D. de la Rubia Phys Rev B 55 1997 14279
- (1997) Phys Rev B , vol.55 , pp. 14279
- Tang, M.¹ Colombo, L.² Zhu, J.³ De La Rubia, T.D.⁴

8
- 0000671373
- F. Cargnoni, C. Gatti, and L. Colombo Phys Rev B 57 1998 170
- (1998) Phys Rev B , vol.57 , pp. 170
- Cargnoni, F.¹ Gatti, C.² Colombo, L.³

9
- 0001633069
- D.M. Stock, B. Weber, and K. Gartner Phys Rev B 61 2000 8150
- (2000) Phys Rev B , vol.61 , pp. 8150
- Stock, D.M.¹ Weber, B.² Gartner, K.³

10
- 0033888538
- B. Weber, D.M. Stock, and K. Gartner Mater Sci Eng B 71 2000 213
- (2000) Mater Sci Eng B , vol.71 , pp. 213
- Weber, B.¹ Stock, D.M.² Gartner, K.³

11
- 0000194184
- M. Ishimaru, S. Munetoh, K. Motooka, K. Moriguchi, and A. Shintani Phys Rev B 58 1998 12583
- (1998) Phys Rev B , vol.58 , pp. 12583
- Ishimaru, M.¹ Munetoh, S.² Motooka, K.³ Moriguchi, K.⁴ Shintani, A.⁵

12
- 0037474985
- L. Pelaz, L.A. Marquez, M. Aboy, J. Barbolla, and G.H. Gilmer Appl Phys Lett 82 2003 2038
- (2003) Appl Phys Lett , vol.82 , pp. 2038
- Pelaz, L.¹ Marquez, L.A.² Aboy, M.³ Barbolla, J.⁴ Gilmer, G.H.⁵

13
- 2842549240
- M.-J. Caturla, T.D. de la Rubia, L.A. Marques, and G.H. Gilmer Phys Rev B 54 1996 16683
- (1996) Phys Rev B , vol.54 , pp. 16683
- Caturla, M.-J.¹ De La Rubia, T.D.² Marques, L.A.³ Gilmer, G.H.⁴

14
- 0344942480
- S.E. Donnelly, R.C. Birtcher, V.M. Vishnyakov, and G. Carter Appl Phys Lett 82 2003 1860
- (2003) Appl Phys Lett , vol.82 , pp. 1860
- Donnelly, S.E.¹ Birtcher, R.C.² Vishnyakov, V.M.³ Carter, G.⁴

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