Development of focused ion beam systems with various ion species

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 241, Issue 1-4, 2005, Pages 335-340

  Ji, Qing ^a,b,e   Leung, Ka Ngo ^b,c   King, Tsu Jae ^d   Jiang, Ximan ^b,c   Appleton, Bill R ^a,f  

^a HARVARD UNIVERSITY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Etcheverry Hall MCI 730   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^f UNIVERSITY OF FLORIDA   (United States)

Author keywords

Focused ion beam; Lithography; Microfabrication

Indexed keywords

FOCUSING; ION SOURCES; LIQUID METALS; LITHOGRAPHY; MAGNETIC FILMS; MOSFET DEVICES;

BIOLOGICAL STUDIES; FOCUSED ION BEAMS; LIQUID-METAL ION SOURCES (LMIS); MICROFABRICATION;

ION BEAMS;

EID: 28044471789     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.07.039     Document Type: Conference Paper

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