Measuring motions of MEMS

MRS Bulletin

Volumn 26, Issue 4, 2001, Pages 305-306

  Freeman, Dennis M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010511625     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2001.66     Document Type: Article

References (11)

1. J.S. Burdess, A.J. Harris, D. Wood, R.J. Pitcher, and D. Glennie, IEEE/ASME J. MEMS 6 (1997) p. 322.
2. C.-H. Liu, A.M. Barzilai, J.K. Reynolds, A. Partridge, T.W. Kenny, J.D. Grade, and H.K. Rockstad, IEEE/ASME J. MEMS 7 (1998) p. 235.
3. D.J. Burns and H.F. Helbig, IEEE/ASME J. MEMS 8 (1999) p. 473.
4. B.K.P. Horn, Robot Vision (MIT Press, Cambridge, MA, 1986).
5. C.Q. Davis and D.M. Freeman, Opt. Eng. 37 (1998) p. 1290.
6. D.M. Freeman and C.Q. Davis, in Proc. Solid-State Sensor and Actuator Workshop 1996 (Transducer Research Foundation, Cleveland) p. 161.
7. D.M. Freeman, A.J. Aranyosi, M.J. Gordon, and S.S. Hong, in Proc. Solid-State Sensor and Actuator Workshop 1998 (Transducer Research Foundation, Cleveland) p. 150.
8. C.Q. Davis and D.M. Freeman, Opt. Eng. 37 (1998) p. 1299.
9. R.C. Gutierrez, K.V. Shcheglov, and T.K. Tang, in Proc. Solid-State Sensor and Actuator Workshop 1998 (Transducer Research Foundation, Cleveland) p. 324.
10. W. Hemmert, M.S. Mermelstein, and D.M. Freeman, in Proc. MEMS '99 (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p. 302.
11. M.R. Hart, R.A. Conant, K.Y. Lau, and R.S. Muller, in Proc. Transducers '99 (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p. 470.