Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 116-125

  Borenstein, Jeffrey T ^a   Greiff, Paul ^a   Sohn, Jerome B ^a   Weinberg, Marc S ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMBRANE CURVATURES; OPTICAL INTERFEROMETRY;

ACCELEROMETERS; CHARACTERIZATION; CRYSTAL DEFECTS; GYROSCOPES; INTERFEROMETRY; INTERNAL STRESSES; MEMBRANES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SENSORS;

MICROMACHINING;

EID: 0030403258     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)