Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry

Applied Optics

Volumn 38, Issue 28, 1999, Pages 5968-5973

  Kim, Seung Woo ^a   Kim, Gee Hong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000188027     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.005968     Document Type: Article

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