Improved vertical-scanning interferometry

Applied Optics

Volumn 39, Issue 13, 2000, Pages 2107-2115

  Harasaki, Akiko ^a   Schmit, Joanna ^a,b   Wyant, James C ^a  

^a UNIVERSITY OF ARIZONA   (United States)

^b Veeco Metrology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; COHERENT LIGHT; PHASE MODULATION; PHASE SHIFT;

SURFACE PROFILES;

INTERFEROMETRY;

EID: 0001363526     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.002107     Document Type: Article

References (29)

1. K. Creath, “Phase-measurement interferometry techniques, ” in Progress in Optics XXVI, E. Wolf, ed. (Elsevier, Amsterdam, The Netherlands, 1988), pp. 349-393.
2. J. E. Greivenkamp and J. H. Bruning, “Phase shifting interferometers, ” in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1992), pp. 501-598.
3. J. Schmit and K. Creath, “Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry, ” Appl. Opt. 34, 3610-3619 (1995).
4. P. de Groot, “Derivation algorithms for phase-shifting inter-ferometry using the concept of a data-sampling window, ” Appl. Opt. 34, 4723-4730 (1995).
5. J. C. Wyant and J. Schmit, “Computerized interferometric measurement of surface microstructure, ” in Optical Inspection and Micromeasurements, C. Gorecki, ed., Proc. SPIE 2782, 26-37 (1996).
6. Y.-Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry, ” Appl. Opt. 23, 4539-4543 (1984).
7. K. Creath, “Step height measurement using two-wavelength phase-shifting interferometry, ” Appl. Opt. 26, 2810-2816 (1987).
8. J. C. Wyant and K. Creath, “Two-wavelength phase-shifting interferometer and method, ” U.S. patent 4, 832, 489 (filed 19 March 1986; issued 23 May 1989).
9. P. J. de Groot, “Extending the unambiguous range of two-color interferometers, ” Appl. Opt. 33, 5948-5953 (1994).
10. N. Balsubramanian, “Optical system for surface topography measurement, ” U.S. patent 4, 340, 306 (filed 4 February 1980; issued 20 July 1982).
11. M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, “An application of an interference microscope to integrated circuit inspection and metrology, ” in Integrated Circuit Microscopy: Inspection and Process Control, K. M. Monahan, ed., Proc. SPIE 775, 233-247 (1987).
12. B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope, ” Appl. Opt. 29, 3784-3788 (1990).
13. G. S. Kino and S. S. C. Chim, “Mirau correlation microscope, ” Appl. Opt. 29, 3775-3783 (1990).
14. S. S. C. Chim and G. S. Kino, “Three-dimensional image realization in interference microscopy, ” Appl. Opt. 31, 2550-2553 (1992).
15. P. J. Caber, “Interferometric profiler for rough surfaces, ” Appl. Opt. 32, 3438-3441 (1993).
16. L. Deck and P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry, ” Appl. Opt. 33, 7334-7338 (1994).
17. K. G. Larkin, “Effective nonlinear algorithm for envelope detection in white light interferometry, ” J. Opt. Soc. Am. A 13, 832-843 (1996).
18. C. Ai and E. L. Novak, “Centroid approach for estimating modulation peak in broad-bandwidth interferometry, ” U.S. patent 5, 633, 715 (filed 19 May 1996; issued 27 May 1997).
19. P. Sandoz, “Wavelet transform as a processing tool in white-light interferometry, ” Opt. Lett. 22, 1065-1067 (1997).
20. R. J. Recknagel and G. Notni, “Analysis of white light inter-ferograms using wavelet methods, ” Opt. Commun. 148, 122-128 (1998).
21. M. Hart, D. G. Vass, and M. L. Begbie, “Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy, ” Appl. Opt. 37, 1764-1769 (1998).
22. A. Harasaki and J. C. Wyant, “Fringe modulation skewing effect in white light vertical scanning interferometry, ” Appl. Opt. 39, 2101-2106 (2000).
23. P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilom-etry by fringe-order identification in white-light phase-shifting interferometry, ” J. Mod. Opt. 44, 519-534 (1997).
24. D. K. Cohen, P. J. Caber, and C. P. Brophy, “Rough surface profiler and method, ” U.S. patent 5, 133, 601 (filed 12 June 1991; issued 28 July 1992).
25. P. Hariharan and M. Roy, “White-light phase-stepping inter-ferometry: measurement of the fractional interference order, ” J. Mod. Opt. 42, 2357-2360 (1995).
26. P. Hariharan, B. F. Oreb, and E. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm, ” Appl. Opt. 26, 2504-2506 (1987).
27. K. Creath, “Calibration of numerical aperture effects in inter-ferometric microscope objectives, ” Appl. Opt. 28, 3333-3338 (1989).
28. C. J. R. Sheppard and K. G. Larkin, “Effect of numerical aperture on interference fringe spacing, ” Appl. Opt. 34, 4731-4734 (1995).
29. K. Hibino, B. F. Oreb, D. I. Farrany, and K. G. Larkin, “Phase shifting for nonsinusoidal waveforms with shifting errors, ” J. Opt. Soc. Am. A 12, 761-768 (1995).