Scanning optical microellipsometer for pure surface profiling

Applied Optics

Volumn 35, Issue 34, 1996, Pages 6663-6668

  See, Chung Wah ^a   Somekh, Michael G ^a   Holmes, Richard D ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

Ellipsometry; Interferometry; Material related phase shift; Scanning optical profilometry

Indexed keywords

EID: 0001661981     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.006663     Document Type: Article

References (15)

1. C. W. See, M. Vaez Iravani, and H. K. Wickramasinghe, “Scanning differential phase contrast optical microscope— application to surface study,” Appl. Opt. 24, 2373-2379 (1985).
2. M. G. Somekh, M. S. Valera, and R. K. Appel, “Scanning heterodyne confocal differential phase and intensity microscope,” Appl. Opt. 34, 4857-4868 (1995).
3. C. W. See, R. K. Appel, and M. G. Somekh, “Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation,” Appl. Phys. Lett. 53, 10-12 (1988).
4. M. J. Downs, W. H. McGivern, and H. J. Ferguson, “Optical system for measuring the profiles of super smooth surfaces,” Precis. Eng. 7, 211-215 (1985).
5. Y. Li and F. E. Talke, “Limitations and corrections of optical profilometry in surface characterization of carbon coated magnetic recording disks,” ASME J. Tribol. 112, 670-677 (1990).
6. M. Smallen and J. J. K. Lee, “Pole tip recession measurements on thin film heads using optical profilometry with phase correction and atomic force microscopy,” AMSE J. Tribol. 115, 382-386 (1993).
7. R. D. Holmes, C. W. See, and M. G. Somekh, “Scanning micro-ellipsometry for extraction of true topography,” Electron. Lett. 31, 358-359 (1995).
8. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarised Light (North-Holland, Amsterdam, 1992), Chap. 3, pp. 153-157.
9. A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, “Beam profile reflectometry: a new technique for dielectric film measurements,” Appl. Phys. Lett. 60, 1301-1303 (1992).
10. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968), Chap. 5, pp. 83-90.
11. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1980), Chap. 13, pp. 615-621.
12. J. H. Bruning, D. R. Herriott, J. E. Gallanher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, “Digital wavefront measuring interferometer for testing optical surfaces and lenses,” Appl. Opt. 13, 2693-2703 (1974).
13. J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, “Development of a three-dimensional noncontact digital optical profiler,” ASME J. Tribol. 108, 1-8 (1986).
14. K. Creath, “Phase-measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1988), Vol. 26, Chap. 5, pp. 365-366.
15. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968), Chap. 7, pp. 324-325.