Optical measurement methods to study dynamic behavior in MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 127-137

  Rembe, Christian ^a   Kant, Rishi ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

MEMS; MEMS characterization; MEMS testing; Microvision system; Stroboscopic interferometer; Vibrometer

Indexed keywords

COMPUTER VISION; INTERFEROMETERS; LASER APPLICATIONS; MICROSTRUCTURE;

LASER DOPPLER VIBROMETER;

MICROELECTROMECHANICAL DEVICES;

EID: 0035758325     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445595     Document Type: Article

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