-
1
-
-
0022717983
-
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming and plastic molding
-
E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Münchmeyer, "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming and plastic molding," Microelectron. Eng., vol. 35, no. 4, 1986.
-
(1986)
Microelectron. Eng.
, vol.35
, Issue.4
-
-
Becker, E.W.1
Ehrfeld, W.2
Hagmann, P.3
Maner, A.4
Münchmeyer, D.5
-
2
-
-
44949275054
-
Three-dimensioanl fabrication using synchrotron radiation
-
W. Ehrfeld and D. Münchmeyer, "Three-dimensioanl fabrication using synchrotron radiation," Nucl. Instrum. Methods Phys. Res. A, vol. 303, pp 523-531, 1991.
-
(1991)
Nucl. Instrum. Methods Phys. Res. A
, vol.303
, pp. 523-531
-
-
Ehrfeld, W.1
Münchmeyer, D.2
-
3
-
-
1842420065
-
A vibrational technique for stress measurement in films
-
A. Jagota, S. Mazur, and R. J. Farris, "A vibrational technique for stress measurement in films," in Mat. Res. Soc. Symp. Proc., 1990, vol. 188, pp 35-40.
-
(1990)
Mat. Res. Soc. Symp. Proc.
, vol.188
, pp. 35-40
-
-
Jagota, A.1
Mazur, S.2
Farris, R.J.3
-
4
-
-
0022928895
-
Determination of the average stress ans its adjustment in thin silicon membranes used in various lithographies
-
B. A. Anderer and U. F. W. Behringer, "Determination of the average stress ans its adjustment in thin silicon membranes used in various lithographies," Microelectron. Eng., vol. 5, pp. 67-71, 1986.
-
(1986)
Microelectron. Eng.
, vol.5
, pp. 67-71
-
-
Anderer, B.A.1
Behringer, U.F.W.2
-
5
-
-
0000490485
-
The vibration of rectangular plate
-
G. B. Warburton, "The vibration of rectangular plate," in Proc. Inst. Mech. Eng. Ser A, 1954, vol. 168, pp. 371-384.
-
(1954)
Proc. Inst. Mech. Eng. Ser A
, vol.168
, pp. 371-384
-
-
Warburton, G.B.1
-
7
-
-
0022308623
-
Improved version of a polarized beam heterodyne interferometer
-
B. R. McAvoy, Ed.
-
D. Royer, E. Dieulesaint, and Y. Martin, "Improved version of a polarized beam heterodyne interferometer," in IEEE Ultrasonics Symp. Proc., B. R. McAvoy, Ed., 1985, p. 432.
-
(1985)
IEEE Ultrasonics Symp. Proc.
, pp. 432
-
-
Royer, D.1
Dieulesaint, E.2
Martin, Y.3
-
8
-
-
0023962776
-
Heterodyne interferometers: Practical limitations and improvements
-
B. Cretin, W.-X. Xie, S. Wang, and D. Hauden, "Heterodyne interferometers: Practical limitations and improvements," Opt. Commun., vol. 65, pp. 157-162, 1988.
-
(1988)
Opt. Commun.
, vol.65
, pp. 157-162
-
-
Cretin, B.1
Xie, W.-X.2
Wang, S.3
Hauden, D.4
-
9
-
-
0018921996
-
Residual stresses in ground steels
-
H. Dölle and J. B. Cohen, "Residual stresses in ground steels," Met. Trans., vol. 11A, p. 159, 1980.
-
(1980)
Met. Trans.
, vol.11 A
, pp. 159
-
-
Dölle, H.1
Cohen, J.B.2
-
10
-
-
5844314212
-
Détermination des contraintes résiduelles par diffraction des rayons X
-
ENSAM, Paris, France
-
L. Castex, J. L. Lebrun, G. Maeder, and J. M. Sprauel, "Détermination des contraintes résiduelles par diffraction des rayons X," in Pub. Sci. Tech., ENSAM, Paris, France, 1981.
-
(1981)
Pub. Sci. Tech.
-
-
Castex, L.1
Lebrun, J.L.2
Maeder, G.3
Sprauel, J.M.4
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