Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5145, Issue , 2003, Pages 33-44

  Petitgrand, Sylvain ^a   Bosseboeuf, Alain ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Interferometry; MEMS; Microscopy; Vibrations

Indexed keywords

COMPUTER SIMULATION; INTERFEROMETRY; LASER PULSES; OPTICAL MICROSCOPY; STROBOSCOPES; VIBRATIONS (MECHANICAL);

AUTOMATIC INTERFEROGRAM ANALYSIS; MICROSCOPIC INTERFEROMETRY; PHASE DELAY; STROBOSCOPIC ILLUMINATION;

MICROELECTROMECHANICAL DEVICES;

EID: 1342288549     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500138     Document Type: Conference Paper

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