An automated interferometric system for bulge and blister test measurements of micromachined membranes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 160-169

  Yahiaoui, Réda ^a   Danaie, Kamran ^a   Petitgrand, Sylvain ^a   Bosseboeuf, Alain ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Blister test; Bulge test; Interferometry; Membranes; Thin films mechanical properties

Indexed keywords

BENDING (DEFORMATION); CAMERAS; CHARGE COUPLED DEVICES; DISCHARGE LAMPS; FAST FOURIER TRANSFORMS; INTERFEROMETRY; MICROMACHINING; MICROSCOPIC EXAMINATION; PHOTOMULTIPLIERS;

INTERFEROMETRIC MICROSCOPES;

THIN FILMS;

EID: 0035758304     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445600     Document Type: Conference Paper

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