Self-reference method for phase-shift interferometry

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4416, Issue , 2001, Pages 152-157

  Ge, Z ^a   Takeda, M ^a  

^a Fuji Photo Optical Co Ltd   (Japan)

Author keywords

Fringe analysis; Interferometry; Phase shift; Phase shift error; Self reference; Tilt error

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ERROR ANALYSIS; FOURIER TRANSFORMS; PHASE SHIFT; SPECTRUM ANALYSIS;

FRINGE ANALYSIS; SELF-REFERENCE METHOD;

INTERFEROMETRY;

EID: 0034878203     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.427037     Document Type: Article

References (8)

1. Digital wave front measuring interferometer for testing optical surfaces and lenses
2. Direct measurement of phase in a spherical-wave Fizeau interferometer
3. Use of an ac heterodyne lateral shear interferometer with real-time wavefront correction systems
4. Semiautomatic phase shifting calibration using digital speckle pattern interferometry
5. Numerical correction of reference phases in phase shifting interferometry by iterative least square fitting
6. Generalized phase-shifting interferometer
7. Algorithm immune to tilt phase-shifting error for phase-shifting interferometers
8. Fourier transforms method of fringe-pattern analysis for computer-based topography and interferometry