Deflection of surface-micromachined devices due to internal, homogeneous or gradient stresses

Sensors and Actuators, A: Physical

Volumn 78, Issue 1, 1999, Pages 1-7

  Greek, Staffan ^a   Chitica, Nicolae ^b  

^a UPPSALA UNIVERSITY   (Sweden)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BRIDGES; DEFLECTION (STRUCTURES); DEFORMATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; STRESS ANALYSIS;

INTERNAL STRESS; SURFACE-MICROMACHINED DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0342398273     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00197-1     Document Type: Article

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