Microscopic surface contouring by fringe projection method

Optics and Laser Technology

Volumn 34, Issue 7, 2002, Pages 547-552

  Quan, C ^a   Tay, C J ^a   He, X Y ^b   Kang, X ^a   Shang, H M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SOUTHEAST UNIVERSITY   (China)

Author keywords

Fringe projection; Micro component; Microscopic surface contouring; Phase shifting

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; CONTOUR MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; OPTICAL PROJECTORS; PHASE SHIFT;

FRINGE PROJECTION;

DIFFRACTION GRATINGS;

EID: 0036783438     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-3992(02)00070-1     Document Type: Article

References (15)

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