Theoretical limits of scanning white-light interferometry signal evaluation algorithms

Applied Optics

Volumn 40, Issue 17, 2001, Pages 2815-2820

  Fleischer, Matthias ^a   Windecker, Robert ^a   Tiziani, Hans J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; MICROPROCESSOR CHIPS; MICROSTRUCTURE; SCANNING; VIDEO CAMERAS;

WHITE LIGHT INTERFEROMETRY;

INTERFEROMETRY;

EID: 0000566137     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.002815     Document Type: Article

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