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Volumn 48, Issue 12, 2000, Pages 3261-3269
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Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers
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Author keywords
[No Author keywords available]
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Indexed keywords
DUCTILITY;
ELASTIC MODULI;
GRAIN BOUNDARIES;
LITHOGRAPHY;
METALLIC FILMS;
MULTILAYERS;
POLYCRYSTALLINE MATERIALS;
STRAIN;
TENSILE TESTING;
THICKNESS MEASUREMENT;
YIELD STRESS;
FREE STANDING POLYCRYSTALLINE THIN FILMS;
MICROLITHOGRAPHIC TECHNIQUES;
STRESS STRAIN RELATIONSHIP MEASUREMENTS;
THIN FILMS;
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EID: 0034226704
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6454(00)00128-2 Document Type: Article |
Times cited : (582)
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References (43)
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