Micro-measurement using grating microscopy

Sensors and Actuators, A: Physical

Volumn 80, Issue 3, 2000, Pages 256-264

  Zhao, Bing ^a   Asundi, Anand ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; DIFFRACTION GRATINGS; IMAGE QUALITY; LIGHT SOURCES; PHASE SHIFT; STRAIN MEASUREMENT;

BERTRAND LENS; GRATING DIFFRACTION; TILTING COMPENSATOR;

OPTICAL MICROSCOPY;

EID: 0033903624     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00289-7     Document Type: Article

References (13)

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