Interferometric back focal plane microellipsometry

Applied Optics

Volumn 37, Issue 10, 1998, Pages 1796-1802

  Feke, Gilbert D ^a   Snow, Daniel P ^a   Grober, Robert D ^a   De Groot, Peter J ^b   Deck, Leslie ^b  

^a Yale University   (United States)

^b ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000549859     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.001796     Document Type: Article

References (16)

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