Dimensional measurement of micro mechanical components with HAR

Microsystem Technologies

Volumn 2, Issue 2, 1996, Pages 75-78

  Breitmeier, U ^a   Hausler G ^b  

^a IDS SCHEER AG   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010475564     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02447754     Document Type: Article

References (4)

1. Häusler G; Neumann J (1992) Coherence radar - an accurate 3D sensor for rough surfaces. SPIE OE/Technology 92, conference 1822, Optics, Illumination, and Image Sensing for Machine Vision VII, Donald J. Svetkoff, ed. Boston Nov
2. Dresel T; Häusler G; Venzke H (1992) Appl. Opt., Vol. 31, No. 7
3. Caber PJ (1993) Interferometric profiler for rough surfaces. Appl. Optics, Vol. 32, No. 19
4. Breitmeier U (1992) Optoelektronische Meßstation für die Qualitätskontrolle an mikromechanischen Strukturen. VDI Berichte Nr. 960