Lateral scanning white-light interferometer

Applied Optics

Volumn 39, Issue 22, 2000, Pages 3906-3913

  Olszak, Artur ^a  

^a Veeco Metrology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES;

WHITE-LIGHT INTERFEROMETERS;

SCANNING;

EID: 0000184146     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.003906     Document Type: Article

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