Stress-induced curvature engineering in surface-micromachined devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 984-993

  Aksyuk, V A ^a   Pardo, F ^a   Bishop, D J ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; MICROMACHINING; MIRRORS; OPTOELECTRONIC DEVICES; PLATES (STRUCTURAL COMPONENTS); RESIDUAL STRESSES; SEMICONDUCTING SILICON; THERMAL EXPANSION;

MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0032688078     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)