Study of sub-pixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5145, Issue , 2003, Pages 169-179

  Hafiane, Adel ^a   Petitgrand, Sylvain ^a   Gigan, Olivier ^b   Bouchafa, Samia ^a   Bosseboeuf, Alain ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b Tronics microsystems   (France)

Author keywords

Image processing; MEMS; Microscopy; Vibrations

Indexed keywords

ALGORITHMS; IMAGE PROCESSING; MICROSCOPIC EXAMINATION; OPTICAL FLOWS; SILICON ON INSULATOR TECHNOLOGY; STROBOSCOPES; VIBRATION MEASUREMENT;

IN-PLANE VIBRATION MEASUREMENTS; STROBOSCOPIC MICROSCOPY; SUB-PIXEL IMAGE PROCESSING ALGORITHMS;

MICROELECTROMECHANICAL DEVICES;

EID: 1342331018     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500141     Document Type: Conference Paper

References (40)

1. K. E. Petersen, C. R. Guarnieri, "Young' modulus measurements of thin films using micromechanics", J. Appl. Phys 50, 6761-6765, 1979
2. L.M. Zhang, D. Uttamchandani, B. Culshaw, "Measurement of the mechanical properties of silicon microresonators". Sensors and Actuators A 29, 79-84, 1991
3. C.R. Stoldt, M.C. Fritz, C. Carraro, R. Maboudian, "Micromechanical properties of silicon-carbide thin films deposited using single source chemical vapor deposition", Appl. Phys. Lett. 79 (3), 347-349, 2001
4. J.-F. Manceau, L. Robert, O. Bastien, C. Oytana, S. Biwersi, "Measurement of residual stresses in a plate using a vibrational technique-application to electrolytic nickel coatings" IEEE J. MEMS 5(4), 243-249, 1996
5. C. Bourgeois, J. Hermann, N. Blanc, N.F. de Rooij, F. Rudolf, "Determination of the elastic temperature coefficients of monocrystalline silicon", Proc. Transducers '95-Eurosensors IX, 92-95, 1995
6. X.Y. Ye, Z.Y. Zhou, Y. Yang, J.H. Zhang, J. Yao, "Determination of mechanical properties of microstructures", Sensors and actuatoirs A 54, 750-754, 1996
7. A.L. Kholkin, C. Wütchrich, D.V. Taylor, N. Setter 1996 "Interferometric measurements of electric field-induced displacements in piezoelectric thin films", Rev. Sci. Instrum. 67 (5), 1935-1941, 1996
8. R.A. Buser, N.-F. de Rooij, "Very high Q factor resonators in monocrystalline silicon", Sensors and Actuators, A21-A23, 323-327, 1990
9. C. T.-C. Nguyen, R.T. Howe, "An integrated CMOS micromechanical resonator high Q oscillator", IEEE J. Solid State Circuits, 34 (4), 440-455, 1999
10. M. Haueis, J. Dual, C. Cavalloni, M. Gnielka, R. Buser, "Packaged bulk micromachined resonant force sensor for high temperature applications". Proc. SPIE 4019, 379-388, 2000
11. C. Rembe, R. Kant, R. S. Muller, "Optical measurement methods to study dynamic behavior in MEMS", Proc. SPIE 4400, 127-137, 2001
12. A. Bosseboeuf, S. Petitgrand, "Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques : status and trends", J. Micromech. Microeng., 13, 2003 to be published
13. W. Osten, W. Jüptner, S. Seebacher, T. Baumbach, "The qualification of optical measurement techniques for the investigation of material parameters of microcomponents", Proc. SPIE 3825, 152-163, 1999
14. L. Salbut, M. Kujawinska M, "The optical measurement station for complex testing of microelement", Opt. Lasers Eng. 36, 225-240, 2001
15. C. Rembe, R. Kant, R. S. Muller, "Optical measurement methods to study dynamic behavior in MEMS", Proc. SPIE, 4400, 127-137, 2001
16. A. Bosseboeuf, S. Petitgrand S., "Optical techniques for static and dynamic characterization of MEMS", Proc. Seiken Symposium No.30 on Micro/Nano Mechatronics, Tokyo, 24/1-24/8, 2002
17. A. Bosseboeuf, S. Petitgrand, "Interferometric optical techniques for the assessment of technology and mechanical behaviour of RF MEMS", Proc. 3rd workshop on millimeter waves, MEMSWAVE, June 2002, Heraklion, Greece, 2002
18. G. Cloud, "Optical methods of engineering analysis". Cambridge University Press, 1995
19. W. Osten, S. Seebacher, W.P.O. Jüptner, Application of digital holography for the inspection of microcomponents, Proc. SPIE, 4400, pp. 1-15, 2001
20. S. Ueha, K. Siota, T. Okada, J. Tsujiuchi, "Optical heterodyne measurement of in-plane vibrations", Opt. Com. 10 (1), 88-90, 1974
21. R. Dandliker, J.-F. Willemin, "Mesuring microvibrations by heterodyne speckle interferometry", Opt. Lett. 6 (4), 165167, 1981
22. B. Zhao, A. Asundi, Microscopic grid methods-resolution and sensitivity, Opt. Lasers Eng, 36, pp. 437-450, 2001.
23. K.L. Turner, P.G. Hatwell, N.C. MacDonald, Multidimensional MEMS motion characterization using laser vibrometry, Proc. Transducers 99, pp. 1144-1147, 1999.
24. Majjad H. 2001. Etude et réalisation de microresonateurs en technique LIGA UV. Doctorate thesis. Université de Franche comté, France
25. D.J. Burns, H.F. Helbig, A system for automatic electrical and optical characterization of micromechanical devices, J. MEMS, 8(4), pp. 473-482, 1999
26. D.M Freeman, "Measuring motions of MEMS," MRS, Bulletin, 4, 305-306, 2001
27. W. Hemmers, M.S. Mermelstein, D.M. Freeman, "Nanometer resolution of three-dimensional motions using video interference microscopy". Proc. IEEE MEMS'99, Orlando, Florida, 1999.
28. G.F. LaVigne, S.L. Miller, "A performance analysis system for MEMS using automated imaging methods", Proc. Int. Test Conf., IIIE Cat No 98CH36270, 442-447, 1998
29. P. Minotti, "Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis", Proc. SPIE 4400, 115-126, 2001
30. A. M. Volpicelli, E. R. Deutsch, S. D. Senturia, "Use of computer microvision to automate electrostatic material property measurement procedures", Proc. Transducers 99, 920-923, 1999
31. N.F. Smith, W.P. Eaton, D.M. tanner, J.J. Allen, "Development of characterization tools for reliability testing of MicroElectroMechanical System actuators", Proc. SPIE 3880, 156-164, 1999
32. C.Q. Davis, D.M. Freeman, "Using a light microscope to measure motions with nanometer accuracy," Opt. Eng, 37(4), 1299-1304, 1998
33. A. Bosseboeuf, P. Nerin, P. Vabre, S. Petitgrand, R. Yahiaoui, "Three dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry", Proc. SPIE, 4400, 36-42, 2001
34. O. Gigan, S. Renard, H. Chen, "Fabrication and characterization of resonant SOI micromechanical sensors based on DRIE micromachining, freestanding release process and direct silicon bonding", Proc. SPIE 4936, 194-204, 2002
35. B.K.P. Horn, B.G. Schunck, "Determining optical flow," Artificial Intelligence. 17, 185-203, 1981
36. J.L. Baronn, D.J. Fleet, S.S. Beauchemin, "Performance of optical flow techniques". Int. J. of Computer Vision, 12(1), 43-77, 1994.
37. B.D. Lucas, T. Kanade, "An iterative image registration technique with an application to stereo vision," Proc. DARPA Image Understanding Workshop, 121-130, 1981.
38. E.P. Simoncelli, E.H. Adelson, D.J. Heeger, "The Probability distributions of optical flow", Proc. IEEE Computer Vision and Pattern Recognition, Maui, 310-315, 1991
39. A. Bainbridge-Smith, R.G. Lane, "Determining optical flow using a differential method", Image and Vision Computing 15, 11-22, 1997.
40. C. Fermüller, D. Shulman, Y. Aloimonos, "The statistics of optical flow", Computer Vision and Image Understanding 82, 1-32, 2001