Some investigations in holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)

Optics and Lasers in Engineering

Volumn 36, Issue 5, 2001, Pages 475-485

  Wernicke, Günther ^a   Bouamama, Larbi ^b   Kruschke, Oliver ^a   Demoli, Nazif ^c   Gruber, Hartmut ^a   Krüger, Sven ^a  

^a HUMBOLDT UNIVERSITY   (Germany)

^b FERHAT ABBAS UNIVERSITY   (Algeria)

^c UNIVERSITY OF ZAGREB   (Croatia)

Author keywords

Heterodyne technique; Holographic microscopy; Phase shifting; Speckle noise

Indexed keywords

ELECTROMECHANICAL DEVICES; ELECTROOPTICAL EFFECTS; HETERODYNING; HOLOGRAMS; HOLOGRAPHIC INTERFEROMETRY; PHASE SHIFT; SPECKLE; SPURIOUS SIGNAL NOISE;

HOLOGRAPHIC MICROSCOPY;

MICROOPTICS;

EID: 0035499131     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00073-2     Document Type: Article

References (16)

1. Micro-opto-electro-mechanical devices and on-chip optical processing
2. Holographic interferometric microscope with conjugate reconstruction for measurement of three-dimensional displacements
3. Holographic interferometric microscope optimised by conjugate reconstruction
4. Holographic interferometric microscopy with conjugate reconstruction applied for the measurement of deformations
5. A depth encoding high resolution holographic microscope
6. Holographic interferometric microscopy with conjugated reconstruction
7. Holographic interferometric microscope for complete displacement determination
8. Determination of three-dimensional displacements for micromechanical components
9. Some considerations on the statistical error analysis in holographic interferometry with application to an optimised interferometer
10. Fringe interpolation by two-reference-beam holographic interferometry reducing sensitivity to hologram misalignment
11. Fourier-transform method of fringe pattern analysis for computer-based topography and interferometry
12. Fourier-transform evaluation of interference patterns: Demodulation and sign ambiguity
13. Evaluation of deformation vectors in holographic interferometric microscopy with conjugated reconstruction
14. Holographic interferometric microscopy