A versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3825, Issue , 1999, Pages 123-133

  Bosseboeuf, Alain ^a   Gilles, Jean Paul ^a   Danaie, Kamran ^a   Yahiaoui, Réda ^a   Dupeux, Michel ^b   Puissant, Jean Pierre ^a   Chabrier, Alain ^a   Fort, Françoise ^a   Coste, Philippe ^a  

^a UNIV PARIS SUD   (France)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

bulge testing; cantilever beams; Interferometry; membranes; vibrations modes; vibrometry

Indexed keywords

CANTILEVER BEAMS; MEMBRANES; NANOCANTILEVERS; NATURAL FREQUENCIES; PROFILOMETRY; SIGNAL PROCESSING; SURFACE MICROMACHINING; VIBRATION MEASUREMENT;

CONTRAST VARIATION; DIRECT VISUALIZATION; DYNAMIC CHARACTERIZATION; MICROMECHANICAL DEVICE; PIEZOELECTRIC EXCITATION; SPATIAL RESOLUTION; VIBRATIONS MODES; VIBROMETRY;

INTERFEROMETRY;

EID: 0001123512     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.364293     Document Type: Conference Paper

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