Stress determination of micromembranes using laser vibrometry

Review of Scientific Instruments

Volumn 67, Issue 5, 1996, Pages 1965-1969

  Biswas, Abhijit ^a   Weller, Tom ^b   Katehi, Linda P B ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037800741     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146952     Document Type: Article

References (17)

1. M. Karnezos, J. Vac. Sci. Technol. B 4, 226 (1986).
2. K. Marumoto, H. Yabe, Y. Matsui, H. Yamashita, and N. Kikuchi, Jpn. J. Appl. Phys. 31, 4205 (1992).
3. R. Kumar, T. Ohta, and Y. Yamashita, Jpn. J. Appl. Phys. 31, 4195 (1992).
4. G. M. Wells, H. T. H. Hector, R. L. Engelstad, and S. R. Palmer, Proc. SPIE 1465, 124 (1991).
5. C. Goldsmith, T.-H. Lin, B. Powers, W.-R. Wu, and B. Novell, IEEE Microwave Theory Tech. Symp. Digest 1, 91 (1995).
6. C. Y. Chi and G. M. Rebeiz, IEEE Microwave Theory Tech. Symp. Digest 43, 730 (1995).
7. T. M. Weller, L. P. Katehi, M. I. Herman, and P. D. Wamhof, IEEE Microwave Theory Tech. Symp. Digest 2, 911 (1994).
8. S. V. Robertson, L. P. Katehi, and G. M. Rebeiz, IEEE Microwave Theory Tech. Symp. Digest 2, 625 (1994).
9. T. M. Weller, L. P. Katehi, and G. M. Rebeiz, IEEE Microwave Guided Wave Lett. 5, 153 (1995).
10. A. Fartash, I. K. Schuller, and M. Grimsditch, J. Appl. Phys. 71, 4244 (1992).
11. T. Tsakalos, Thin Solid Films 75, 293 (1981).
12. O. Tabata, K. Kawahata, S. Sugiyama, and I. Igarashi, Sensors Actuator 20, 135 (1989).
13. B. S. Berry, W. C. Pritchet, and C. E. Uzoh, J. Vac. Sci. Technol. B 7, 1565 (1989).
14. M. A. Maden, A. Jagota, S. Mazur, and R. J. Farris, J. Am. Ceram. Soc. 77, 625 (1994).
15. Q. K. Tong, M. A. Maden, A. Jagota, and R. J. Farris, J. Am. Ceram. Soc. 77, 636 (1994).
16. L. F. Kinsler, A. R. Frey, A. B. Coppens, and J. V. Sanders, Fundamentals of Acoustics, 3rd ed. (Wiley, New York, 1982), p. 78.
17. P. M. Morse and K. Uno Ingard, Theoretical Acoustics (McGraw-Hill, New York, 1968), p. 91.