The application of digital holography for the inspection of microcomponents

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 1-15

  Osten, Wolfgang ^a   Seebacher, Sönke ^a   Jüptner, Werner ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Digital holography; Direct phase measurement; Materials parameters; Microcomponent testing; Multi wavelengths contouring

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; PHASE MEASUREMENT; POISSON RATIO; THERMAL EXPANSION;

DIGITAL HOLOGRAPHY;

HOLOGRAPHIC INTERFEROMETRY;

EID: 0035758324     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445589     Document Type: Conference Paper

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