Practical common-path heterodyne surface profiling interferometer with automatic focusing

Optics and Laser Technology

Volumn 33, Issue 4, 2001, Pages 259-265

  Zhao, Hongzhi ^a,b   Liang, Rong ^a   Li, Dacheng ^a   Cao, Mang ^a  

^a TSINGHUA UNIVERSITY   (China)

^b MASSACHUSETTS GENERAL HOSPITAL   (United States)

Author keywords

Automatic focusing; Common path heterodyne interferometer; Phase measurement

Indexed keywords

HETERODYNING; PHASE MEASUREMENT; PROFILOMETRY; VOLTAGE CONTROL;

AUTOMATIC FOCUSING;

INTERFEROMETERS;

EID: 0035372862     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-3992(01)00035-4     Document Type: Article

References (14)

1. In-process sensors for surface roughness and their applications
2. Imaging of spheres and surface profiling by confocal microscopy
3. In-process measurement of surface roughness using light scattering
4. Design of an optical probe for surface profile measurement
5. Rough surface interferometry at 10.6μm
6. Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement
7. In-process roughness measurement on moving surfaces
8. Common-path optical heterodyne profilometer: A configuration
9. Optical heterodyne profilometry
10. Optical heterodyne profilometer
11. Heterodyne common path surface profilometer
12. Instrumental noise effect in an optical heterodyne profile
13. Investigation of common-path interference profilometry