New test structures and techniques for measurement of mechanical properties of MEMS materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 78-91

  Sharpe Jr , William N ^a   Yuan, Bin ^a   Vaidyanathan, Ranji ^a   Edwards, Richard L ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL SYSTEMS; POLYSILICON;

ETCHING; FATIGUE OF MATERIALS; FRACTURE MECHANICS; INTERFEROMETRY; LASER APPLICATIONS; MECHANICAL PROPERTIES; SEMICONDUCTING SILICON; THIN FILMS;

ELECTROMECHANICAL DEVICES;

EID: 0030392559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (32)