A new measurement system for microscopic formtesting of microstructures by means of multiple wavelength interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 144-151

  Schneefuß, Karsten ^a   Pfeifer, Tilo ^a  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

Author keywords

Formtesting of microstructures; Interferometry; Microstructures; Multiple wavelength interferometry; Production of large area microstructures; Step and repeat process

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETRY; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS;

MULTIPLE WAVELENGTH INTERFEROMETRY;

OPTICAL SYSTEMS;

EID: 0035758663     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445597     Document Type: Conference Paper

References (8)

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