Phase-shifting interferometer/ellipsometer capable of measuring the complex index of refraction and the surface profile of a test surface

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 15, Issue 2, 1998, Pages 538-548

  Rogala, Eric W ^a   Barrett, Harrison H ^a,b  

^a UNIVERSITY OF ARIZONA   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHM; ARTICLE; INSTRUMENTATION; INTERFEROMETRY; LIGHT; MONTE CARLO METHOD; REFRACTOMETRY; STATISTICAL MODEL;

ALGORITHMS; INTERFEROMETRY; LIGHT; LIKELIHOOD FUNCTIONS; MONTE CARLO METHOD; REFRACTOMETRY;

EID: 0031988803     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.15.000538     Document Type: Article

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