Inspection of microsystems with a laser scanning microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3825, Issue , 1999, Pages 144-150

  Dussler, Gerd ^a   Brocher B ^a   Pfeifer, Tilo ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

confocal imaging; Laser Scanning Microscope; MEMS; micro assembly; microfabrication; process observation; quality control

Indexed keywords

LASER APPLICATIONS; MEMS; MICROFABRICATION; MICROMACHINING; MICROMANIPULATORS; MICROSCOPES; MICROSYSTEMS; QUALITY CONTROL; SCANNING; SURFACE ANALYSIS; SURFACE DEFECTS; VISUALIZATION;

CONFOCAL IMAGING; CONFOCAL LASER SCANNING MICROSCOPE; LASER SCANNING MICROSCOPE; LASER SCANNING MICROSCOPY; MECHANICAL FUNCTIONS; MICRO ASSEMBLY; PROCESS VISUALIZATION; THREE DIMENSIONAL GEOMETRY;

PROCESS CONTROL;

EID: 0346351801     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.364295     Document Type: Conference Paper

References (6)

1. M. Weck, J. Hümmler, and B. Petersen, "Assembly of Hybrid Micro Microsystens in a Large-Chamber-Scanning Electron Microscopeby Use of Mechanical Grippers", In Stella W. Pang: Micromachining and Microfabrication Process Technology III, Proceedings of SPIE Vol. 3223 (1997)
2. T. Pfeifer, "Fertigungsmeßtechnik", Oldenbourg, München 1998
3. T. Wilson, and C. Sheppard, "Theory and practise of scanning optical microscopy", Academic Press, London 1984
4. M. Gu, "Principles of Three-Dimensional Imaging in Confocal Microscopes", World Scientific, Singapore 1996
5. T. Pfeifer, B. Brocher, and G. Dussler, "Observation of the Microassembly Process with a Confocal Laser-Scanning-Microscope" 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam 1998 In: Reichl, H., Obermeier, E (Hrsg.): Micro System Technologies 98 VDE-Verlag GmbH Berlin Offenbach, S. 621-623
6. T. Pfeifer, B. Brocher, and G. Dussler, "Fibre-Optic Supervision for the Micro-Assembly Process" 1 euspen conference, Bremen 1999