3D full field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 36-42

  Bosseboeuf, Alain ^a   Nerin, Philippe ^b   Vabre, Pascal ^b   Petitgrand, Sylvain ^a   Yahiaoui, Réda ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b Fogale Nanotech   (France)

Author keywords

Low coherence interferometry; Mechanical properties; MEMS; Stroboscopy; Vibration modes

Indexed keywords

FAST FOURIER TRANSFORMS; INTERFEROMETRY; LIGHT EMITTING DIODES; PHASE SHIFT; PROFILOMETRY; SIGNAL PROCESSING; STROBOSCOPES;

WHITE LIGHT FRINGE SCANNING INTERFEROMETRIC PROFILOMETRY;

MICROELECTROMECHANICAL DEVICES;

EID: 0035759093     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445603     Document Type: Article

References (20)

1. J.F. Manceau, L. Robert, O. Bastien, C. Oytana, S. Biwersi, "Measurement of residual stresses in a plate using a vibrational technique-application to electrolytic nickel coatings", J. Microelectromechanical Systems 5(4), p.243-249 (1996).
2. P. Sriram, J.I. Craig, D. Hanagud, "scanning laser doppler techniques for vibration testing" Experimental techniques, November/December issue, p.21-26 (1992).
3. G. Benedetto, R. Gavioso, R. Spagnolo, "Measurement of microphone membrane displacement with an optical beam deflection technique", Rev. Sci. Instrum., 66 (12) p. 5563-5566 (1995).
4. G.C. Brown, R.J. Pryputniewicz "Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography", Opt Eng. 37(5) p.1398-1405 (1988).
5. M. Hart, RA. Conant, K.Y. Lau, R.S. Muller, "Time resolved measurement of optical MEMS using stroboscopic interferometry", Proc. Transducers '99, p 470-473 (1999).
6. S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, J.P. Gilles, "3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope", to be published in Optics and Lasers in Engineering (2001).
7. R. Yahiaoui, S. Petitgrand, A. Bosseboeuf, K. Danaie, "Vibrométrie interférométrique continue et stroboscopique: Application à la caractérisation des modes de vibrations", to be published in Nano et Microtechnologies (2001).
8. P. Aswendt, R. Höfling, K. Hiller, "Testing microcomponents by speckle interferometry", Proc. SPIE 3825, p. 165-173 (1999).
9. A. Bosseboeuf, J.P. Gilles, K. Danaie, R. Yahiaoui, M. Dupeux, J.P. Puissant, A. Chabrier, F. Fort, P. Coste, "A versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices", Proc. SPIE 3825, p. 123-133 (1999).
10. S. Petitgrand, R. Yahiaoui, A. Bosseboeuf, K. Danaie, "Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization", Proc. Lasers in Metrology and art conservation. Conf. Microsystems engineering:Metrology and Inspection II, Munich, June 19-21 (2001).
11. B.S. Lee, T.C. Strand, "Profilometry with a coherence scanning microscope" Appl. Opt. 29(26) p.3784-3787 (1990).
12. T. Dresel, G. Haüsler, H. Venzke, "Three dimensional sensing of rough surfaces by coherence radar", Appl. Opt. 31(7), p.919-925 (1992).
13. G.S. Kino, S.S.C. Chim, "Mirau correlation microscope", Appl. Opt. 29(26), p.3775-3783 (1990).
14. P. Sandoz, G. Tribillon, "Profilometry by zero-order interference fringe identification", J. Modern Opt. 40(9), p.1691-1700 (1993).
15. U. Breitmeir, G. Häusler, "Dimensional measurement of micromechanical components with HAR", Microsystem Technologies 2, p.75-78 (1996).
16. M.Hill, H. Berney, B. Lane, "Wafer level inspection for determination of yield of surface-micromachined pressure sensors", Proc. SPIE 3825 p.16-23 (2000).
17. Microsurf 3D. Fogale naotech. http://www.fogale.fr
18. G.M. Brown, R.M. Grant, G.W. Stroke, "Theory of holographic interferometry", J. Ac. Soc. Am. 45(5) p.1166-1179 (1969).
19. M. Boutry, A. Bosseboeuf, G. Coffignal, "Characterization of stress in metallic films on silicon with micromechanical devices", Proc. SPIE 2879, p.126-134 (1996).
20. R.D.Blevins, "Formulas for natural frequency and mode shape", Krieger Publishing Company, Florida, (1979).