SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3825, Issue , 1999, Pages 16-23

Wafer level inspection for determination of yield of surface-micromachined pressure sensors

(4) Hill, Martin a Berney, Helen a Lane, Bill a Hynes, Eamon b

a UNIVERSITY COLLEGE CORK (Ireland)

b Analog Device Raheen Industrial Estate ^* (Ireland)

Author keywords

AFM; interference rings; interferometry; pressure sensor; Surface micromachining; wafer level inspection; yield

Indexed keywords

ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; FIELD EFFECT TRANSISTORS; INTERFEROMETRY; MICROMACHINING; PRESSURE SENSORS; SURFACE MICROMACHINING;

AFM; COMMERCIAL-SCALE PRODUCTION; ELECTRICAL AND MECHANICAL PROPERTIES; INTERFERENCE RINGS; SURFACE MICROMACHINING PROCESS; WAFER LEVEL; WHITE-LIGHT INTERFEROMETRY; YIELD;

INSPECTION;

EID: 0010435631 PISSN: 0277786X EISSN: 1996756X Source Type: Conference Proceeding
DOI: 10.1117/12.364296 Document Type: Conference Paper

Times cited : (3)

References (7)

1
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- Development and characterisation of a surface micromachined FET pressure sensor on a CMOS process
- Southampton, UK, Sept. 13-16
- E. Hynes, D. McAuliffe, M. O' Neill, W.A. Lane, G. Kelly, H. Berney, M. Hill, "Development and characterisation of a surface micromachined FET pressure sensor on a CMOS process", Eurosensors XII, 403-406, Southampton, UK, Sept. 13-16, 1998
- (1998) Eurosensors XII , pp. 403-406
- Hynes, E.¹ McAuliffe, D.² Neill M.O.'.³ Lane, W.A.⁴ Kelly, G.⁵ Berney, H.⁶ Hill, M.⁷

2
- 84941365635
- Critical processing issues for micromachined structural layer etching and sealing
- (in-press)
- H. Berney, A. Kemna, E. Hynes, M. O' Neill, M. Hill, W.A. Lane, "Critical processing issues for micromachined structural layer etching and sealing". Sensors and Actuators, (in-press)
- Sensors and Actuators
- Berney, H.¹ Kemna, A.² Hynes, E.³ Neill M.O.'.⁴ Hill, M.⁵ Lane, W.A.⁶

3
- 84941359956
- Protective and structural layers for surface micromachined pressure sensors
- Ulvik, Norway, June
- H. Berney, A. Kemna, E. Hynes, M. O'Neill & W. Lane, "Protective and structural layers for surface micromachined pressure sensors", MME 98, Ulvik, Norway, June 1998
- (1998) MME 98
- Berney, H.¹ Kemna, A.² Hynes, E.³ O'Neill, M.⁴ Lane, W.⁵

4
- 84941331443
- Laurel Brook Road, P.O. Box 448, Middlefield, CT 06455-0448, USA
- Scanning white light interference microscope New View of Zygo Corp., Laurel Brook Road, P.O. Box 448, Middlefield, CT 06455-0448, USA
- Scanning White Light Interference Microscope New View of Zygo Corp

5
- 12844266379
- Measurement capabilities of optical 3D-sensors for MST applications
- U. Brand, J. Flügge, "Measurement capabilities of optical 3D-sensors for MST applications", Microelectronic Engineering, 41/42, 623-626, 1998
- (1998) Microelectronic Engineering , vol.41-42 , pp. 623-626
- Brand, U.¹ Flügge, J.²

6
- 84941335986
- TMX2000 Explorer AFM of TopoMetrix Corp., 5403 Betsy Ross Drive, Santa Clara, CA 95054-1162, USA
- TMX2000 Explorer AFM of TopoMetrix Corp., 5403 Betsy Ross Drive, Santa Clara, CA 95054-1162, USA

7
- 21844498571
- Measurements of the mechanical behavior of micromachined aluminized silicon and silicon nitride diaphragms
- Tokyo
- Ralf Schellin, Giesla Hess, Wolfgang Kuhnel, Christiane Thielemann, David Trost, Jörg Wacker, "Measurements of the mechanical behavior of Micromachined Aluminized Silicon and Silicon Nitride Diaphragms", Sensors and Materials, 347-360, Tokyo, 1995
- (1995) Sensors and Materials , pp. 347-360
- Schellin, R.¹ Hess, G.² Kuhnel, W.³ Thielemann, C.⁴ Trost, D.⁵ Wacker, J.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.