The qualification of optical measurement techniques for the investigation of material parameters of microcomponents

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3825, Issue , 1999, Pages 152-164

  Osten, Wolfgang ^a   Jüptner, Werner P O ^a   Seebacher, Sönke ^a   Baumbach, Torsten ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

digital holography; displacement; material parameters; microcomponent testing; optical metrology; shape

Indexed keywords

COMPUTER GENERATED HOLOGRAPHY; OPTICAL DATA PROCESSING; UNITS OF MEASUREMENT;

DIGITAL HOLOGRAPHY; DISPLACEMENT; MATERIAL PARAMETER; MICROCOMPONENT; OPTICAL METROLOGY; SHAPE;

ASPECT RATIO;

EID: 0000085531     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.364297     Document Type: Conference Paper

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